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C03600 - SEMI C36 - Specification for Phosphoric Acid StdPbc-0924 The purpose of this Document

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Description

The purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard

This standard is intended to establish the definitions

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SEMI C14-95 (Reapproved 1102)

SEMI C27-0600 (technical revision)

C03600 - SEMI C36 - Specification for Phosphoric Acid StdPbc-0924 The purpose of this DocumentThe purpose of this Specification is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation. The scope of this Specification is for grades of phosphoric acid used in the semiconductor industry. Referenced

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